Industries

SemiCOnductor

 
semiconductor
 

Advances in wireless technology have applied pressure to semiconductor fabricators to develop processing apparatus with improved throughput, and semiconductors having a smaller footprint and improved performance. Industry players need to protect their investments in the technologies constantly being developed to meet this demand as the pace of innovation and the consequences of falling behind have continued to grow.

The deep experience of our attorneys in this field, enables us to clearly grasp not only the technological aspects of these advances, but to see their place in the development of the semiconductor processing field as a whole. This broad-based experience informs all of our patent prosecution and our counseling of industry leaders with respect to their business concerns and portfolio strategy.

Exemplary areas in which we have developed expertise include:

  • PVD, CVD, and ALD semiconductor processing

  • Substrate chucking devices

  • Processing chamber spare parts

  • High aspect ratio features

  • Substrate defect reduction solutions

  • Increased substrate processing system throughput

  • Stacked semiconductors

  • Deposition methods

  • Processor chips, memory chips (DRAM, SRAM, ROM, NVRAM), and ASIC chips